TY  - BOOK
AU  - Esashi, Masayoshi
AU  - Zhou, Zhaoying
ED  - International Commission for Optics, Society of Photo-optical Instrumentation Engineers, United States. Air Force
TI  - ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
SN  - 9780819460639
SN  - 200628201
U1  - 621 BRE 
PY  - 2006///
CY  - Bellingham, WA
PB  - SPIE
KW  - Imaging systems - Congresses
KW  - Microelectromechanical systems - Congresses
KW  - Nanostructured materials - Congresses
KW  - Nanotechnology - Congresses
KW  - Optoelectronic devices - Congresses
N1  - Includes bibliographical references and index
ER  -