TY  - BOOK
AU  - Helbert, John N
TI  - Handbook of VLSI microlithography : principles, technology, and applications
SN  - 9780815514442
SN  - 28173
U1  - 621.381531 HEL 
PY  - 2001///
CY  - Park Ridge, NJ
PB  - Noyes Publications/William Andrew Pub
KW  - Integrated circuits - Very large scale integration
KW  - Microlithography
N1  - Includes bibliographical references and index
ER  -