Handbook of VLSI microlithography : principles, technology, and applications 
[edited] by John N. Helbert 
 - 2nd ed 
 - Park Ridge, NJ  Noyes Publications/William Andrew Pub  2001 
 - xxi, 1001 p. : ill. ; 24 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780815514442 
<br/><br/><label>ISSN: </label>28173 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits - Very large scale integration<br/>Microlithography
<br/><br/><label>Dewey Class. No.: </label>621.381531 HEL