Handbook of silicon wafer cleaning technology 
edited by Karen A. Reinhardt, Werner Kern 
 - 2nd ed 
 - Norwich, NY  William Andrew  2008 
 - xxvi, 718 p. : ill. ; 24 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780815515548 
<br/><br/><label>ISSN: </label>2007037151 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon-on-insulator technology
<br/><br/><label>Dewey Class. No.: </label>621.38152 REI