TY  - BOOK
AU  - Shul, R. J
AU  - Pearton, S. J
TI  - Handbook of advanced plasma processing techniques
SN  - 9783540667728
SN  - 38824
U1  - 621.044 SHU 
PY  - 2000///
CY  - Berlin
PB  - Springer
KW  - Electronic circuits
KW  - Integrated circuits - Design and construction
KW  - Plasma engineering
KW  - Plasma etching
KW  - Plasma spraying
N1  - Includes bibliographical references and index
ER  -