Shul, R. J <br/><br/>
Handbook of advanced plasma processing techniques 
R.J. Shul, S.J. Pearton (eds.) 
 - Berlin  Springer  c2000 
 - xvi, 653 p. : ill. ; 24 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9783540667728 
<br/><br/><label>ISSN: </label>38824 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic circuits<br/>Integrated circuits - Design and construction<br/>Plasma engineering<br/>Plasma etching<br/>Plasma spraying
<br/><br/><label>Dewey Class. No.: </label>621.044 SHU