TY  - BOOK
AU  - Teo, Selin
ED  - International Conference on Materials for Advanced Technologies (2009 : Singapore)
TI  - NEMS/MEMS technology and devices : selected peer reviewed papers from the international conference on materials for advanced technologies 2009, symposium L, 28 June - 3 July, Singapore
SN  - 9780878493210
SN  - 201048714
U1  - 621.381 TEO 
PY  - 2009///
CY  - Stafa-Zurich
PB  - Trans Tech Publications
KW  - Microelectromechanical systems - Congresses
KW  - Nanoelectromechanical systems - Congresses
N1  - Includes bibliographical references and indexes
ER  -