TY  - BOOK
AU  - Kittler, Martin
TI  - Gettering and defect engineering in the semiconductortechnology : GADEST '89 : proceedings of the 3rd international AutumnMeeting, Garzau, German Democrating Republic, October 8-13,1989
SN  - 9783908044048
U1  - 541.3 KIT.6&7 
PY  - 1989///
CY  - Brookfield
PB  - SciTech Pub.
KW  - Electrical engineering--Materials
KW  - Getters
KW  - Semiconductors
KW  - Silicon crystals--Defects
N1  - Includes index
ER  -