Gettering and defect engineering in the semiconductortechnology : GADEST '89 : proceedings of the 3rd international AutumnMeeting, Garzau, German Democrating Republic, October 8-13,1989 
ed. by Martin Kittler 
 - Brookfield  SciTech Pub.  1989 
 - XI, 607 s. : ill.; 24 cm 
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>9783908044048 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrical engineering--Materials<br/>Getters<br/>Semiconductors<br/>Silicon crystals--Defects
<br/><br/><label>Dewey Class. No.: </label>541.3 KIT.6&7