Gettering and defect engineering in semiconductor technology: Gadest '95 : held in Parkhotel Schloss Wulkow, near Berlin, Germany, September 02-07, 1995
edited by M Kittler, H Richter and Cor L Claeys
- Uetikon-Zuerich, Switzerland Scitec Publications 1995
- xv,621p.;24cm