TY  - BOOK
AU  - Pichaud, B
ED  - GADEST 2005 (2005 : Giens, France)
TI  - Gettering and defect engineering in semiconductor technology XI : GADEST 2005 : proceedings of the 11th international autumn meeting : Giens, France, September 25-30, 2005
SN  - 9783908451136
SN  - 200627663
U1  - 621.38152 PIC 
PY  - 2005///
CY  - Zurich, Switerland
PB  - Trans Tech Publications
KW  - Getters - Congresses
KW  - Semiconductors - Defects - Congresses
KW  - Semiconductors - Materials - Congresses
KW  - Silicon crystals - Congresses
N1  - Includes bibliographical references and index
ER  -