TY  - BOOK
AU  - Chabal, Yves Jean
TI  - Fundamental aspects of silicon oxidation
SN  - 9783540416821
SN  - 200102005
U1  - 546.6832 CHA 
PY  - 2001///
CY  - Berlin
PB  - Springer
KW  - Silicon oxide
N1  - Includes bibliographical references and index
ER  -