TY  - BOOK
AU  - Descour, Michael R
AU  - Rantala, Juha T
ED  - Society of Photo-optical Instrumentation Engineers
TI  - Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA
SN  - 9780819439628
SN  - 200226587
U1  - 621.381 DES 
PY  - 2001///.s
CY  - Bellingham, WA
PB  - SPIE
KW  - Microelectromechanical systems - Congresses
KW  - Microelectronic packaging - Congresses
KW  - Optoelectronic devices - Congresses
N1  - Includes bibliographical references and index
ER  -