Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA 
Michael R. Descour, Juha T. Rantala, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering 
 - Bellingham, WA  SPIE  c2001.s 
 - xxx, 152 p. : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819439628 
<br/><br/><label>ISSN: </label>2002265872 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems - Congresses<br/>Microelectronic packaging - Congresses<br/>Optoelectronic devices - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.381 DES