TY  - BOOK
AU  - Yao, Nan
TI  - Focused ion beam systems : basics and applications
SN  - 9780521831994
SN  - 200730034
U1  - 624.17723 YAO 
PY  - 2007///
CY  - Cambridge
PB  - Cambridge University Press
KW  - Focused ion beams
KW  - Focused ion beams - Industrial applications
KW  - Ion bombardment
N1  - Includes bibliographical references and index
ER  -