TY  - BOOK
AU  - Paik, Ungyu
AU  - Park, Jea-Gun
TI  - Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
SN  - 9781420059113
SN  - 200805128
U1  - 621.38152 PAI 
PY  - 2009///
CY  - Boca Raton, FL
PB  - CRC Press/Taylor & Francis Group
KW  - Chemical mechanical planarization
KW  - Nanoelectronics
KW  - Nanoparticles
N1  - Includes bibliographical references (p. 171-175) and index
ER  -