Paik, Ungyu <br/><br/>
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices 
Ungyu Paik, Jea-Gun Park 
 - Boca Raton, FL  CRC Press/Taylor & Francis Group  2009 
 - xiii, 191 p., [14] p. of plates : ill. (some col.) ; 25 cm 
<br/><br/> Includes bibliographical references (p. 171-175) and index 
<br/><br/><label>ISBN: </label>9781420059113 
<br/><br/><label>ISSN: </label>2008051282 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemical mechanical planarization<br/>Nanoelectronics<br/>Nanoparticles
<br/><br/><label>Dewey Class. No.: </label>621.38152 PAI