TY  - BOOK
AU  - Bucknall, David G
TI  - Nanolithography and patterning techniques in microelectronics
SN  - 9780849334474
SN  - 200636508
U1  - 621.381531 BUC 
PY  - 2005///
CY  - Cambridge ; Boca Raton, FL
PB  - CRC Press, Woodhead Pub
KW  - Microlithography
KW  - Nanotechnology
N1  - Includes bibliographical references and index
ER  -