TY  - BOOK
AU  - Tse, Ampere A
TI  - Nanofabrication : fundamentals and applications
SN  - 9789812705426
SN  - 200827508
U1  - 620.5 TSE 
PY  - 2008///
CY  - Singapore ; Hackensack, N.J
PB  - World Scientific
KW  - Lithography, Electron beam
KW  - Nanostructured materials
KW  - Nanostructures
KW  - Scanning probe microscopy
N1  - Includes bibliographical references and index
ER  -