Nanofabrication : fundamentals and applications 
editor, Ampere A. Tseng 
 - Singapore ; Hackensack, N.J  World Scientific  c2008 
 - viii, 574 p. : ill. (some col.) ; 26 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9789812705426 
<br/><br/><label>ISSN: </label>2008275080 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Lithography, Electron beam<br/>Nanostructured materials<br/>Nanostructures<br/>Scanning probe microscopy
<br/><br/><label>Dewey Class. No.: </label>620.5 TSE