TY  - BOOK
AU  - Maeda, Ryutaro
AU  - Malshe, Ajay P
AU  - Sood, Dinesh K
ED  - International Symposium on Smart Materials, Nano-, and Micro-Smart Systems (2002 : RMIT University), RMIT University, Society of Photo-optical Instrumentation Engineers, Swinburne University of Technology
TI  - Nano- and microtechnology : materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia
SN  - 9780819447319
SN  - 200327813
U1  - 621.381 SOO 
PY  - 2002///
CY  - Bellingham, WA
PB  - SPIE
KW  - Mechatronics - Congresses
KW  - Microelectromechanical systems - Congresses
KW  - Microelectronics - Congresses
KW  - Nanotechnology - Congresses
N1  - Includes bibliographical references and author index
ER  -