Ottevaere, Heidi <br/><br/>
Nano- and micro-metrology : 16-17 June 2005, Munich, Germany 
Heidi Ottevaere, Peter DeWolf, Diederik S. Wiersma; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society... [et al.] ; published by SPIE--the International Society for Optical Engineering 
 - Bellingham, WA  SPIE  2005 
 - 1 v. (various pagings) : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and author index 
<br/><br/><label>ISBN: </label>9780819458582 
<br/><br/><label>ISSN: </label>2005284352 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Optical measurements - Congresses
<br/><br/><label>Dewey Class. No.: </label>681.25 OTT