TY  - BOOK
AU  - Minh, Phan Ngoc
AU  - Masayoshi, Esashi
AU  - Takahito, Ono
TI  - Fabrication of silicon microprobes for optical near-field applications
SN  - 9780849311543
SN  - 200104393
U1  - 621.36 MIN 
PY  - 2002///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Micromachining
KW  - Microprobe analysis
KW  - Near-field microscopy
KW  - Silicon
N1  - Includes bibliographical references and index
ER  -