TY  - BOOK
AU  - Bahreyni, Behraad
TI  - Fabrication and design of resonant microdevices
SN  - 9780815515777
SN  - 200801771
U1  - 621 BAH 
PY  - 2008///
CY  - Norwich, NY
PB  - W. Andrew Inc
KW  - Microelectromechanical systems - Design and construction
KW  - Microfabrication
KW  - Resonance
N1  - Includes bibliographical references and index
ER  -