TY  - BOOK
AU  - Kumar, Ajay
AU  - Wu, Banqiu
TI  - Extreme ultraviolet lithography
SN  - 9780071549189
SN  - 200900218
U1  - 621.381531 WU 
PY  - 2009///
CY  - New York
PB  - McGraw-Hill
KW  - Extreme ultraviolet lithography
KW  - Integrated circuits - Design and construction
KW  - Integrated circuits - Masks
N1  - Includes bibliographical references and index
ER  -