TY  - BOOK
AU  - MacDonald, Carolyn Ann
ED  - Society of Photo-optical Instrumentation Engineers
TI  - EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado
SN  - 9780819432537
SN  - 710730
U1  - 621.36 MAC 
PY  - 1999///
CY  - Bellingham, WA
PB  - SPIE
KW  - Extreme ultraviolet lithography. - Congresses
KW  - Ion beam lithography - Congresses
KW  - Lithography, Electron beam - Congresses
KW  - Neutron sources - Congresses
KW  - X-ray optics - Congresses
N1  - Includes bibliographical references and index
ER  -