Electrical characterization of silicon-on-insulator materials and devices
by Sorin Cristoloveanu and Sheng S. Li
- Boston Kluwer Academic 1995
- xiv, 381 p; : ill. ; 25 cm
Includes bibliographical references and index
9780792395485
94043971
Semiconductors - Design and construction Semiconductors - Electric properties Silicon-on-insulator technology