TY  - BOOK
AU  - Baklanov, Mikhail
AU  - Green, Martin
AU  - Maex, Karen
TI  - Dielectric films for advanced microelectronics
SN  - 9780470013601
SN  - 200603074
U1  - 621.381 BAK 
PY  - 2007///
CY  - Chicester, West Sussex
PB  - John Wiley & Sons
KW  - Dielectric films
KW  - Microelectronics - Materials
N1  - Includes bibliographical references and index
ER  -