Dielectric films for advanced microelectronics 
edited by Mikhail Baklanov, Martin Green, and Karen Maex 
 - Chicester, West Sussex  John Wiley & Sons  c2007 
 - xxii, 486 p. : ill. ; 26 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780470013601 
<br/><br/><label>ISSN: </label>2006030740 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Dielectric films<br/>Microelectronics - Materials
<br/><br/><label>Dewey Class. No.: </label>621.381 BAK