TY  - BOOK
AU  - Tan, Hark Hoe
ED  - Australian National University, Australian National University. Research School of Physical Sciences, Society of Photo-optical Instrumentation Engineers, University of Adelaide. Centre for Biomedical Engineering
TI  - Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia
SN  - 9780819469717
SN  - 201048356
U1  - 621.381 TAN 
PY  - 2008///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Microelectromechanical systems - Congresses
KW  - Nanotechnology - Congresses
KW  - Photolithography - Congresses
KW  - Photomechanical processes - Congresses
KW  - Photonics - Congresses
N1  - Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics. Includes bibliographical references and index
ER  -