Design, test, integration and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France 
Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.] 
 - Bellingham, Wash  SPIE  c2001 
 - xvi, 558 p. : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819441096 
<br/><br/><label>ISSN: </label>2002265434 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems - Congresses<br/>Microelectronic packaging - Congresses<br/>Micromachining - Congresses<br/>Optoelectronic devices - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.381 COU