TY  - BOOK
AU  - Courtois, B
TI  - Design, test, integration and packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France
SN  - 9780819436450
SN  - 200126759
U1  - 621.381 PRO 
PY  - 2000///
CY  - Bellingham, Wash
PB  - SPIE--the International Society for Optical Engineering
KW  - Microelectromechanical systems - Congresses
KW  - Microelectronic packaging - Congresses
KW  - Micromachining - Congresses
KW  - Optoelectronic devices - Congresses
ER  -