Design, test, integration and packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France 
Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.] 
 - Bellingham, Wash  SPIE--the International Society for Optical Engineering  c2000 
 - xv, 596 p. : ill. ; 28 cm 
<br/><br/><label>ISBN: </label>9780819436450 
<br/><br/><label>ISSN: </label>2001267594 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems - Congresses<br/>Microelectronic packaging - Congresses<br/>Micromachining - Congresses<br/>Optoelectronic devices - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.381 PRO