TY  - BOOK
AU  - Bourtois, Bernard
ED  - Society of Photo-optical Instrumentation Engineers
TI  - Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
SN  - 9780819431547
SN  - 689203
U1  - 621.381 COV 
PY  - 1999///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Microelectromechanical systems - Congresses
N1  - Includes bibliographical references and index
ER  -