Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France 
Bernard Courtois ... [et. al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ... [et. al] 
 - Bellingham, Wash  SPIE  c1999 
 - 2 v. (xix, 1192 p.) : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819431547 
<br/><br/><label>ISSN: </label>689203 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.381 COV