TY  - BOOK
AU  - Franzon, Paul D
ED  - Institute of Electrical and Electronics Engineers. South Australia Section, Society of Photo-optical Instrumentation Engineers, United States. Air Force
TI  - Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia
SN  - 9780819443236
SN  - 200227963
U1  - 621.381 FRA 
PY  - 2001///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Microelectromechanical systems - Design and construction - Congresses
KW  - Microelectronic packaging - Congresses
N1  - Includes bibliographical references and index
ER  -