TY  - BOOK
AU  - Rieger, Michael L
AU  - Thiele, Joerg
ED  - SEMATECH (Organization), SPIE (Society)
TI  - Design for manufacturability through design-process integration IV : 24-25 February 2010, San Jose, California, United States
SN  - 9780819480552
SN  - 201028351
U1  - 620.0042 RIE 
PY  - 2010///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Integrated circuits - Defects - Analysis - Congresses
KW  - Integrated circuits - Design and construction - Congresses
KW  - Microelectronics industry - Quality control - Congresses
KW  - Quality control - Congresses
KW  - Semiconductor wafers - Defects - Analysis - Congresses
KW  - Semiconductors - Design and construction - Congresses
N1  - Includes bibliographical references and author index
ER  -