Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA 
Alfred K.K. Wong, Vivek, K. Singh, chairs/editors ; cooperating organization, SEMATECH, Inc (USA) ; sponsored and published by SPIE--the International Society for Optical Engineering 
 - Bellingham, Wash  SPIE  c2006 
 - 1 v. (various pagings) : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and author index 
<br/><br/><label>ISBN: </label>9780819461995 
<br/><br/><label>ISSN: </label>2006281963 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits - Defects - Analysis - Congresses<br/>Integrated circuits - Design and construction - Congresses<br/>Microelectronics industry - Quality control - Congresses<br/>Quality control - Congresses<br/>Semiconductor wafers - Defects - Analysis - Congresses<br/>Semiconductors - Design and construction - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.382 WON