TY  - BOOK
AU  - Liebmann, Lars W
ED  - International SEMATECH, Society of Photo-optical Instrumentation Engineers
TI  - Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA
SN  - 9780819457363
SN  - 200627238
U1  - 621.381 LIE 
PY  - 2005///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Integrated circuits - Defects - Analysis - Congresses
KW  - Integrated circuits - Design and construction - Congresses
KW  - Microelectronics industry - Quality control - Congresses
KW  - Quality control - Congresses
KW  - Semiconductor wafers - Defects - Analysis - Congresses
KW  - Semiconductors - Design and construction - Congresses
N1  - Includes bibliographical references and author index
ER  -