TY  - BOOK
AU  - Liebmann, Lars W
ED  - International SEMATECH, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers
TI  - Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA
SN  - 9780819452924
SN  - 200430308
U1  - 621.381 LIE 
PY  - 2004///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Integrated circuits - Defects - Analysis - Congresses
KW  - Integrated circuits - Design and construction - Congresses
KW  - Microelectronics industry - Quality control - Congresses
KW  - Quality control - Congresses
KW  - Semiconductor wafers - Defects - Analysis - Congresses
KW  - Semiconductors - Design and construction - Congresses
N1  - Includes bibliographical references and index
ER  -