TY - BOOK AU - Griscom, David L AU - Pacchioni, G AU - Skuja, L TI - Defects in SiO₂ and related dielectrics : science and technology SN - 9780792366850 SN - 48787 U1 - 548.85 PAC PY - 2000/// CY - Boston, MA PB - Kluwer Academic Publishers N1 - Includes bibliographical references and index ER -