TY - BOOK AU - Fleetwood, D. M AU - Pantelides, Sokrates T AU - Schrimpf, Ronald Donald TI - Defects in microelectronic materials and devices SN - 9781420043761 SN - 200801872 U1 - 621.381 FLE PY - 2009/// CY - Boca Raton, FL PB - CRC Press KW - Integrated circuits - Defects KW - Metal oxide semiconductor field-effect transistors - Testing KW - Microelectronics - Materials - Testing N1 - Includes bibliographical references and index ER -