TY  - BOOK
AU  - Emami, Iraj
AU  - Tobin, Kenneth W
ED  - International SEMATECH
TI  - Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA
SN  - 9780819461988
SN  - 200729671
U1  - 629.895 EMA 
PY  - 2006///
CY  - Bellingham, WA
PB  - SPIE
KW  - Intelligent control systems - Mathematical models - Congresses
KW  - Manufacturing processes - Automatic control - Congresses
KW  - Manufacturing processes - Mathematical models - Congresses
KW  - Process control - Mathematical models - Congresses
N1  - Includes bibliographical references and author index
ER  -