MOEMS display and imaging systems III : 24-25 January 2005, San Jose, California, USA 
Hakan Urey, David L. Dickensheets, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA) 
 - Bellingham, WA  SPIE  2005 
 - xli, 214 p. : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and author index 
<br/><br/><label>ISBN: </label>9780819456953 
<br/><br/><label>ISSN: </label>2005296018 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Imaging systems - Design and construction - Congresses<br/>Microelectromechanical systems - Congresses<br/>Optics, Adaptive - Congresses<br/>Scanning systems - Design and construction - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.367 URE