MOEMS and miniaturized systems VIII : 27-28 January 2009, San Jose, California, United States 
David L. Dickensheets, Harald Schenk, Wibool Piyawattanametha, editors ; sponsored and published by SPIE ; symposium cosponsors, Texas Instruments Inc. (United States) ... [et al.] 
 - Bellingham, WA  SPIE  c2009 
 - viii, (various pagings) : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819474544 
<br/><br/><label>ISSN: </label>2010293899 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems - Congresses<br/>Micromechanics - Congresses<br/>Miniature electronic equipment - Congresses<br/>Optical scanners - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.367 DIC