TY  - BOOK
AU  - Grill, Alfred
TI  - Cold plasma in materials fabrication : from fundamentals to applications
SN  - 780310551
SN  - 93042135
U1  - 621.044 GRI 
PY  - 1994///
CY  - New York
PB  - IEEE Press ; Institute of Electrical and Electronics Engineers
KW  - Low temperature plasmas
KW  - Manufacturing processes
KW  - Plasma engineering
N1  - Includes bibliographical references and index
ER  -