TY  - BOOK
AU  - Borst, Christopher L
AU  - Gill, William N
AU  - Gutmann, Ronald J
TI  - Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses : fundamental mechanisms and application to IC interconnect technology
SN  - 9781402071935
SN  - 200202878
U1  - 621.38152 BOR 
PY  - 2002///
CY  - Deventer, The Netherlands ; Boston, MA
PB  - Kluwer Academic Publishers
KW  - Chemical mechanical planarization
KW  - Grinding and polishing
KW  - Interconnects (Integrated circuit technology)
KW  - Semiconductors - Polishing
N1  - Includes bibliographical references and index
ER  -