TY  - BOOK
AU  - Hitchman, Michael L
AU  - Jones, Anthony C
TI  - Chemical vapour deposition : precursors, processes and applications
SN  - 9780854044658
SN  - 200941937
U1  - 671.735 JON 
PY  - 2009///
CY  - Cambridge
PB  - Royal Society of Chemistry
KW  - Chemical vapor deposition
N1  - Includes bibliographical references and index
ER  -