TY  - BOOK
AU  - Fortin, Jeffrey B
AU  - Lu, T. -M
TI  - Chemical vapor deposition polymerization : the growth and properties of parylene thin films
SN  - 9781402076886
SN  - 200306527
U1  - 621.38152 FOR 
PY  - 2004///
CY  - Deventer, The Netherlands ; Boston, MA
PB  - Kluwer Academic Publishers
KW  - Chemical vapor deposition
KW  - Thin films
N1  - Includes bibliographical references (p. [91]-99) and index
ER  -