TY  - BOOK
AU  - Bodermann, Bernd
AU  - Bosse, Harald
AU  - Silver, Richard M
ED  - European Optical Society, SPIE (Society), SPIE Europe, Wissenschaftliche Gesellschaft Lasertechnik
TI  - Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany
SN  - 9780819476739
SN  - 201045926
U1  - 681.25 BOS 
PY  - 2009///
CY  - Bellingham, WA
PB  - SPIE
KW  - Integrated circuits - Congresses
KW  - Optical measurements - Congresses
KW  - Semiconductors - Design and construction - Congresses
N1  - Includes bibliographical references and author index
ER  -